Flexible tilted wafer carrier

Details Flexible tilted wafer carrier Flexible tilted wafer carrier

1996-10-04

1998-04-14

Morgan, Eileen P.

Abrading

Abrading process

Glass or stone abrading

451287, 451288, 451405, B24B 100

Patent

active

057385688

ABSTRACT:
Disclosed is an improved apparatus and method for polishing a semiconductor wafer, which involves mounting the wafer to a carrier assembly. The wafer carrier assembly has been split into two plates which are joined by springs around the peripheries. The wafer carrier assembly is universally mounted on a rotation shaft which rotates the wafer carrier assembly during cleaning. An adjustment screw tilts the upper plate relative to the lower plate. The adjustment screw can be located at any predetermined point on a circle around the rotation shaft. Since the bottom plate is forced relatively flat by contact with a polishing pad, the net effect of the wafer carrier assembly is to apply increased pressure to the wafer edge under the screw. This provides for an even polishing action to compensate for otherwise non-uniform radial polishing action on the wafer surface.

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