Measuring and testing – Fluid pressure gauge – With pressure and/or temperature compensation
Reexamination Certificate
2006-08-01
2006-08-01
Lefkowitz, Edward (Department: 2855)
Measuring and testing
Fluid pressure gauge
With pressure and/or temperature compensation
C361S283100
Reexamination Certificate
active
07082834
ABSTRACT:
Low pressure sensing and imperviousness to corrosion and to the effects of harsh environments are achieved in a pressure sensor that employs a flexible membrane supporting piezoresistive elements. A plurality of piezoresistive elements are aligned substantially collinearly across one surface of the flexible membrane. Innermost piezoresistive elements are disposed in such a way that they experience tension in response to an applied pressure, whereas outermost piezoresistive elements are disposed in such a way that they experience compression in response to the same applied pressure. Contact pads for each end of each piezoresistive element allow the elements to be configured in any number of desirable arrangements. In one exemplary embodiment, four piezoresistive elements are disposed along a main central axis of the membrane. The contacts of the elements are connected to form a Wheatstone bridge. Conventional Wheatstone bridge techniques are utilized to convert an applied pressure into an output electrical signal. The membrane includes amorphous or nanocrystalline semiconductor layers grown on a flexible substrate such as Kapton or suitable plastic materials.
REFERENCES:
patent: 3328653 (1967-06-01), Wolf, Jr.
patent: 4345476 (1982-08-01), Singh
patent: 4433580 (1984-02-01), Tward
patent: 4467656 (1984-08-01), Mallon et al.
patent: 4685469 (1987-08-01), Keller
patent: 5020377 (1991-06-01), Park
patent: 5432372 (1995-07-01), Ohtani
patent: 5610340 (1997-03-01), Carr et al.
patent: 5637905 (1997-06-01), Carr et al.
patent: 5668320 (1997-09-01), Cowan
patent: 5681997 (1997-10-01), McHale et al.
patent: 5867886 (1999-02-01), Ratell et al.
patent: 6006607 (1999-12-01), Bryzek et al.
patent: 6131466 (2000-10-01), Vigna et al.
patent: 6568276 (2003-05-01), Ciminelli
patent: 6700174 (2004-03-01), Miu et al.
Paul Horowitz et al (The art of Electronics II edition 1989 Canbridge University Press p. 421.
C. Malhaire, D. Barbier, “Design of a Polysilicon-on-Insulator Pressure Sensor With Original Polysilicon Layout for Harsh Environment”, Thin Solid Films 427 (2003) 362-366.
E. Defay et al., “PZT Thin Films Integration for the Realisation of a High Sensitivity Pressure Microsensor Based on a Vibrating Membrane”, Sensors and Actuators A 99 (2002) 64-67.
Andreas Kuoni et al., “Polyimide Membrane With ZnO Piezoelectric Thin Film Pressure Transducers as a Differential Pressure Liquid Flow Sensor”, Journal of Micromechanics and Microengineering 13 (2003) S103-S107.
R. Timothy Edwards, “Microfabrication Lab Project Report: A Simple CMOS Pressure Sensor”, Dec. 1994.
Lim Hee C.
Petrova Roumiana S.
Allen Andre
Lefkowitz Edward
New Jersey Institute of Technology
Ranieri Gregory C.
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