Flexible non-extensible hinge for photomask assembly

Details Flexible non-extensible hinge for photomask assembly Flexible non-extensible hinge for photomask assembly

1982-03-05

1984-05-01

Thibodeau, Paul J.

Stock material or miscellaneous articles

Sheets or webs edge spliced or joined

1563041, 1563043, 428 58, 428 61, 428101, 428428, 428429, B32B 1706, G03B 2704

Patent

active

044461844

ABSTRACT:
Hinged glass photomask assemblies for photolithographic processes are disclosed wherein a flexible polymeric hinge is used in combination with a flexible, non-extensible binding strip which prevents lateral movement of the glass plates thereby providing for repeated use of the phototool without the use of registration systems such as alignment pin assemblies.

REFERENCES:
patent: 3927943 (1975-12-01), Pohl et al.
patent: 4032233 (1977-06-01), Oscarsson et al.
patent: 4138305 (1979-02-01), Williams
patent: 4147380 (1979-04-01), Nelson

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