Flexible membrane probe and method of use thereof

Details Flexible membrane probe and method of use thereof Flexible membrane probe and method of use thereof

2005-05-31

2005-05-31

Cuneo, Kamand (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S671000, C324S754090

Reexamination Certificate

active

06900652

ABSTRACT:
A measuring apparatus for measuring a semiconductor wafer, or a film or coating thereon, includes an electrically conductive wafer chuck and a probe having a probe body defining an internal cavity in fluid communication with an electrically conductive and elastic or resilient membrane. The membrane and a topside of the semiconductor wafer are moved into spaced relation when the semiconductor wafer is supported by the wafer chuck. A pressure of fluid supplied to the internal cavity of the probe body is selectively controlled whereupon the membrane expands into contact with the topside of the semiconductor wafer. A suitable test stimulus is applied to the membrane and the semiconductor wafer and the response of the semiconductor wafer to the test stimulus is measured.

REFERENCES:
patent: 3405361 (1968-10-01), Kattner et al.
patent: 3596228 (1971-07-01), Reed et al.
patent: 3992073 (1976-11-01), Buchoff et al.
patent: 5023561 (1991-06-01), Hillard
patent: 5144228 (1992-09-01), Sorna et al.
patent: 5225771 (1993-07-01), Leedy
patent: 5583445 (1996-12-01), Mullen
patent: 5585736 (1996-12-01), Hshieh et al.
patent: 5767691 (1998-06-01), Verkuil
patent: 5977783 (1999-11-01), Takayama et al.
patent: 6084420 (2000-07-01), Chee
patent: 6198300 (2001-03-01), Doezema et al.
patent: 6294922 (2001-09-01), Okubo et al.
patent: 6337565 (2002-01-01), Ito et al.
patent: 6368887 (2002-04-01), Lowrey et al.
patent: 6426638 (2002-07-01), Di Stefano
patent: 6492827 (2002-12-01), Mazur et al.
patent: 2002/0036514 (2002-03-01), Taura et al.

Affiliated with

Also associated with

Rating

Flexible membrane probe and method of use thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Flexible membrane probe and method of use thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Flexible membrane probe and method of use thereof will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3421337