Flexible membrane assembly for a CMP system and method of using

Details Flexible membrane assembly for a CMP system and method of using Flexible membrane assembly for a CMP system and method of using

2011-06-14

2011-06-14

Eley, Timothy V (Department: 3723)

Abrading

Abrading process

Utilizing nonrigid tool

C451S041000, C451S288000, C451S290000, C451S398000, C451S442000

Reexamination Certificate

active

07959496

ABSTRACT:
A flexible membrane assembly for a wafer carrier in a CMP system. The flexible membrane assemble has a flat, flexible membrane joined to a rigid cylindrical sidewall.

REFERENCES:
patent: 6012964 (2000-01-01), Arai et al.
patent: 6210255 (2001-04-01), Zuniga et al.
patent: 6872130 (2005-03-01), Zuniga
patent: 6966822 (2005-11-01), Kajiwara et al.
patent: 7033252 (2006-04-01), Fuhriman et al.

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