Flexible-leaf substrate edge cleaning apparatus

Details Flexible-leaf substrate edge cleaning apparatus Flexible-leaf substrate edge cleaning apparatus

1998-12-01

2000-07-25

Chin, Randall E.

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 211, 15 883, 15102, B08B 1102, A46B 1304

Patent

active

060922532

ABSTRACT:
An apparatus for cleaning edges and/or bevel areas of substrates is described. In one embodiment, the present invention includes a core having a plurality of flexible leaves spaced along an external surface of the core. A motor is coupled to the core for rotating the core about an axis of rotation. The rotation of the core causes the flexible leaves to rotate such that the leaves extend outward to intermittently strike points along the edge and/or bevel areas of the wafer.

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