Flexible-leaf substrate edge cleaning apparatus

Details Flexible-leaf substrate edge cleaning apparatus Flexible-leaf substrate edge cleaning apparatus

1996-12-30

1999-05-11

Chin, Randall E.

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 211, 15 883, 15102, B08B11/02

Patent

active

059013990

ABSTRACT:
An apparatus for cleaning edges and/or bevel areas of substrates is described. In one embodiment, the present invention includes a core having a plurality of flexible leaves spaced along an external surface of the core. A motor is coupled to the core for rotating the core about an axis of rotation. The rotation of the core causes the flexible leaves to rotate such that the leaves extend outward to intermittently strike points along the edge and/or bevel areas of the wafer.

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