Flex-line vibration isolator and cryopump with vibration isolati

Details Flex-line vibration isolator and cryopump with vibration isolati Flex-line vibration isolator and cryopump with vibration isolati

1986-11-14

1989-06-06

Capossela, Ronald C.

Refrigeration

Storage of solidified or liquified gas

Liquified gas transferred as liquid

62 555, 138149, 181207, 285 49, F17C 702

Patent

active

048359726

ABSTRACT:
A vibration isolator particularly suited to isolating a closed cycle refrigerator in a cryopump includes a bellows having o-rings made of vibration damping material secured between the corragations of the bellows. A soft damping material maintains a low spring constant and also dampens all frequencies transmitted into the isolator.

REFERENCES:
patent: 2386505 (1945-10-01), Puchy
patent: 3125858 (1964-03-01), Baittinger
patent: 3345245 (1967-10-01), Hanusa
patent: 3369826 (1968-02-01), Boosey et al.
patent: 3894403 (1975-07-01), Longsworth
patent: 3952777 (1976-04-01), Uhlig
patent: 4050665 (1977-09-01), Matthews et al.
patent: 4352643 (1982-10-01), Iijima
patent: 4363217 (1982-12-01), Venuti
patent: 4394819 (1983-07-01), Averill
patent: 4526015 (1985-07-01), Laskaris
patent: 4539822 (1985-09-01), Sundquist
"Use of Vibration-Isolated Cryopumps to Improve Electron Microscopes and Electron Beam Lithography Units", J. Vac. Sci. Technol., A 1(2), pp. 237-240, Apr.-Jun. 1983.
National Electrostatics Corp., "Vibration Isolator for Cryopumps and Turbomolecular Pumps", Brochure.
Leybold-Heraeus Vacuum Products Inc., 1983-1984 Catalog, 4.26.
Balzers 1983-1985 Catalog, D28, D20, D21.
B. D. Vinogradov and V. V. Chernoberevskii, "Damping of Tubes by a Constrained Coating", Sov. Phys. Acoust., 26(4), pp. 329-330, Jul.-Aug. 1980.
R. Z. Zeinetdinov et al., "Vibration Damping of Tubes by Vibration-Absorbing Coatings", Sov. Phys. Acoust., 26(4), pp. 312-314, Jul.-Aug. 1980.

Affiliated with

Also associated with

Rating

Flex-line vibration isolator and cryopump with vibration isolati does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Flex-line vibration isolator and cryopump with vibration isolati, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Flex-line vibration isolator and cryopump with vibration isolati will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-31375