Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1979-11-29
1985-09-03
Punter, William H.
Optics: measuring and testing
By polarized light examination
With light attenuation
250237G, G01B 1130
Patent
active
045389136
ABSTRACT:
Flatness testing apparatus for testing the flatness of a surface of a body of material a source of substantially monochromatic light for producing a light beam. First and second reticles are provided which are capable of passing the light beam. Means is provided for sensing light from the light source after it has passed through the reticles. An objective lens is provided which is adapted to be disposed adjacent the surface of the body of material. A first lens is provided in front of the source of light for imaging the source of light onto the objective lens and a second lens is provided in front of the means for sensing light for imaging the objective lens onto the means for sensing light. A mirror is provided for receiving light from the light beam after it has passed through the first reticle and for reflecting light through the second reticle to the light sensing means. Means is provided for causing relative movement of the reticle images with respect to each other to cause modulation of the light beam in accordance with the flatness of the surface.
REFERENCES:
patent: 3600588 (1971-08-01), Sayce
patent: 3614212 (1971-10-01), Hock
patent: 3761179 (1973-09-01), Plummer et al.
patent: 3783270 (1974-01-01), Kamachi
Altfather, K. W., "Image Assessment for the Automated Testing of Mirror Flatness", Conf.: Image Assessment & Specification, Rochester N.Y., May 20-22, 1974, pp. 207-212.
Optical Coating Laboratory, Inc.
Punter William H.
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