Flatness measuring apparatus

Details Flatness measuring apparatus Flatness measuring apparatus

1982-12-14

1986-12-09

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

364525, G01B 902

Patent

active

046277331

ABSTRACT:
A flatness measuring apparatus which optically measures the flatness of an object, such as a slider surface of a magnetic head at a magnetic tape recording apparatus, required to have the flatness of hyperfine accuracy of 0.05 .mu.m or less. The flatness measuring apparatus is so constructed that interference fringes related to the plane of the object and a reference plane are produced and caught by a one-dimensional image sensor and that an optical element disposed between the image sensor and an interference fringe producing means is turned to change the visual field in the extending direction of the interference fringe, and is provided with a unit for measuring the flatness in connection with the turning position information of the optical element and an output of the image sensor, so that the error factor, such as the ununiformness in the characteristic of each bit at the image sensor or disorder with the lapse of time in the optical system, can be eliminated to thereby gain the measurement accuracy of 0.01 .mu.m, while, each component or assembly thereof having an accuracy on the order of 10 .mu.m.

REFERENCES:
Moore et al., "Large Aperture AC Interferometer for Optical Testing", Applied Optics, vol. 17, No. 24, pp. 3959-3963, 12/78.
Forman, "The Zygo Interferometer System", Proc. SPIE, vol. 192, pp. 41-48, 1979.

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