Flatness examining device

Details Flatness examining device Flatness examining device

1987-11-12

1989-08-22

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

G01B 902

Patent

active

048590614

ABSTRACT:
A flatness examining device which comprises a radiation beam generating means, an objective lens, an optical means having a reference plane wherein a test plane to be measured is placed opposite to the reference plane and the optical means introduces the radiation beam onto both the reference plane and the test plane to produce an interference fringe, a parallel plate member in the radiation beam path between the objective lens and the optical member, and the parallel plate member is capable of changing its inclination by a predetermined angle against the radiation beam path. The incidence of the light beam on the reference plane is changed by shifting the radiation beam slightly so that the test plane can be measured whether or not it is convex or concave.

REFERENCES:
patent: 3891320 (1975-06-01), Kimura et al.
patent: 4072423 (1978-02-01), Kimura et al.
patent: 4293218 (1981-10-01), Nielsen et al.
patent: 4325637 (1982-04-01), Moore

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