Flat thin film type oxygen sensor

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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G01N 2758

Patent

active

043471145

ABSTRACT:
In an oxygen sensor comprising an oxygen ion conductive solid electrolyte, an electronically conductive reference electrode layer formed on one side of the electrolyte layer, an electronically conductive measurement electrode layer formed on the other side of the electrolyte layer, and a partition layer of an electrochemically inactive material formed on the outer side of the reference electrode layer, at least one of the reference and measurement electrode layers has a plurality of openings through which two layers which put therebetween the one of the electrode layers are united with each other.

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