Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1980-07-31
1983-06-28
Rosenberger, R. A.
Optics: measuring and testing
By polarized light examination
With light attenuation
356345, G01B 1130
Patent
active
043902774
ABSTRACT:
A scatterometer for determining root mean square (RMS) scattering of light from reflective surfaces using monochromatic light which is generated by a source, expanded, collimated into a sampling beam, directed to a movable reflective surface which directs the light to the surface to be tested at a nominally normal incidence angle. The reflected light varies from the normal incidence angle by an amount determined by the slope of the surface being tested. The modified reflected beam is then passed through the collimating lens and reflected to a beam splitter for determination of the thus measured slope. The components of the light are measured by annular concentric sensors, with the amount of light received by the outer sensors being a reflection of the amount of slope on the surface of the plane tested. Also, a second beam splitter and detector combine to provide both corrections for the system and measurement of small slope angle variations in the surface being tested.
REFERENCES:
patent: 3229564 (1966-01-01), Meltzer
patent: 3565568 (1971-02-01), Hock
patent: 3715165 (1973-02-01), Smith
patent: 3782827 (1974-01-01), Nisenson et al.
patent: 3784309 (1974-01-01), Brelot et al.
patent: 3815998 (1972-10-01), Tietze
patent: 3836787 (1974-09-01), Ash
patent: 3871771 (1975-03-01), Scott
patent: 3885875 (1975-05-01), Rosenfeld et al.
patent: 3922093 (1975-11-01), Dandliker et al.
patent: 3925785 (1975-12-01), Firtion et al.
patent: 3971956 (1976-07-01), Jakeman et al.
patent: 4070113 (1978-01-01), Frazer et al.
patent: 4072426 (1978-02-01), Horn
patent: 4289400 (1981-09-01), Kubota et al.
Bissell Henry M.
McDonnell Douglas Corporation
Rosenberger R. A.
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