Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Reexamination Certificate
2005-08-09
2005-08-09
Williams, Joseph (Department: 2879)
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
C427S395000, C427S255280
Reexamination Certificate
active
06926572
ABSTRACT:
A method of forming a passivation film in a flat panel display device includes forming the flat panel display device on a substrate, bringing the flat panel display device into a chamber in order to form the passivation film, injecting precursors containing constituent elements of the passivation film into the chamber where the precursors include at least oxygen plasma, ammonia plasma, or nitrogen plasma, and forming the passivation film of an inorganic insulating material at a temperature of 20-220° C. through a surface chemical reaction between the precursors by a plasma enhanced atomic layer deposition method.
REFERENCES:
patent: 5374570 (1994-12-01), Nasu et al.
patent: 5496597 (1996-03-01), Soininen et al.
patent: 5909081 (1999-06-01), Eida et al.
patent: 5952778 (1999-09-01), Haskal et al.
patent: 6270572 (2001-08-01), Kim et al.
patent: 6743475 (2004-06-01), Asikainen et al.
patent: 2001/0046558 (2001-11-01), Kim et al.
patent: 2001/0052752 (2001-12-01), Ghosh et al.
patent: 2002/0003403 (2002-01-01), Ghosh et al.
patent: 2001-284042 (2001-10-01), None
J. Vac. Sci. Technoi. A. 15 (6) Nov./Dec. 1997, Dependence of Atomic layer-deposited AlcO3 films characteristics on growth temperature and A1 percursors of A1 (CH3)3 and AlC13, S. Yun et al., 5 pages.
Kim Young Shin
Lee Yong Eui
Park Sang Hee
Yun Sun Jin
Blakely Sokolff Taylor & Zafman
Electronics and Telecommunications Research Institute
Williams Joseph
Zimmerman Glenn
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