Photocopying – Projection printing and copying cameras – Methods
Patent
1988-03-20
1989-10-31
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Methods
355 53, 355 54, 356401, G03B 2732, G03B 2744
Patent
active
048780863
ABSTRACT:
A flat panel display device, such as a liquid crystal panel display device, of large size and a method and apparatus of manufacture of the same. The display device may be provided by discrete or divided display sections. For the manufacture of the panel display device, a pattern for forming picture elements and a drive circuit therefor is photolithographically transferred onto the whole surface of a substrate or base plate in a step-and-repeat manner. In one aspect of the invention, different masks having patterns corresponding to portions of the first-mentioned pattern are used. After the pattern of one of the masks is transferred onto one portion of the substrate, the one mask is replaced by another which the substrate is moved stepwise so that the pattern of the other mask can be transferred onto another portion of the substrate. By repeating the pattern transfer, with different masks, and repeating the stepwise movement of the substrate, the whole of the first-mentioned pattern is transferred onto the whole surface of the substrate with a high resolving power.
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"Lithography for Flat Panel Video Displays", Solid State Technology, Feb. 1988.
Isohata Junji
Nakamura Yoshiharu
Totsuka Masao
Canon Kabushiki Kaisha
Wintercorn Richard A.
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