Flat grind stage assembly for an automatic edge grinder

Details Flat grind stage assembly for an automatic edge grinder Flat grind stage assembly for an automatic edge grinder

1989-04-28

1991-12-31

Schmidt, Frederick R.

Abrasive tool making process, material, or composition

With carbohydrate or reaction product thereof

51283E, 5116571, 51 35, B24B 500, B24B 1700, B24B 4900, B24B 906

Patent

active

050760211

ABSTRACT:
The flat grind stage assembly is programmed so that the grinding wheel is first caused to move along a straight path to form a flat on a wafer while the wafer is held in a stationary position. Thereafter, the grinding wheel is returned to the mid-point of the flat and then moved away from the flat. The wafer is then rotated and grinding commences when the end of the flat is reached so that a circular periphery is ground on the remainder of the wafer while the axis of the grinding wheel remains stationary.

REFERENCES:
patent: 3971168 (1976-07-01), Nishimura
patent: 4344260 (1982-08-01), Ogiwara
patent: 4502459 (1985-03-01), Dyer
patent: 4558686 (1985-12-01), Ono
patent: 4594814 (1986-06-01), Olszewski
patent: 4638601 (1987-01-01), Steere
patent: 4864779 (1989-09-01), Ozaki

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