Flat box for confining a flat article under a special atmosphere

Details Flat box for confining a flat article under a special atmosphere Flat box for confining a flat article under a special atmosphere

1995-02-07

1996-08-27

Ackun, Jacob K.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

206723, 2062131, B65D 8105, B65D 8120

Patent

active

055492053

ABSTRACT:
A box is provided for confining a semiconductor water in an ultra clean atmosphere between working or storage points. It is mainly constituted by a body closed by a door and equipped with a gas distributing block making it possible to diffuse a quasi-laminar flow around the article within the body.

REFERENCES:
patent: 4422547 (1983-12-01), Abe et al.
patent: 4585122 (1986-04-01), Stegenga
patent: 4886162 (1989-12-01), Ambrogio
patent: 5074736 (1991-12-01), Ishii

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