Flashlight-radiant apparatus

Details Flashlight-radiant apparatus Flashlight-radiant apparatus

1984-02-22

1986-01-28

Albritton, C. L.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219347, 219354, A21B 100, A21B 122

Patent

active

045673527

ABSTRACT:
A flashlight-radiant apparatus is constructed of a housing defining an object-handling space and an irradiation space located adjacent to the object-handling space, a plurality of flash discharge lamps provided side by side in an upper part of the irradiation space, a gas-discharging member provided in the upper part of the irradiation space for controlling the atmosphere of the housing, and an object-supporting table movable reciprocally between the object-handling space and the irradiation space in the housing and equipped with built-in subsidiary heating. An object, for example, a silicon wafer is preheated on the object-supporting table while the object-supporting table is located in the object-handling space. The flashlight-radiant apparatus has a simple structure, enjoys a high level of handling safety, assures long service life for its flash discharge lamps, and is suitable particularly for annealing semiconductor wafers.

REFERENCES:
patent: 4436985 (1984-03-01), Weber
patent: 4449037 (1984-05-01), Shibamata et al.

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