Flare measuring mask and flare measuring method of...

Details Flare measuring mask and flare measuring method of... Flare measuring mask and flare measuring method of...

2007-03-06

2007-03-06

Young, Christopher G. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C430S030000

Reexamination Certificate

active

10761215

ABSTRACT:
A flare measuring mask and a flare measuring method are capable of measuring flare at high sensitivity by an optical measuring instrument. The first measuring portion has a double cross shielding area including first stripe-shaped shielding portions of the same figure aligned in parallel at regular intervals and third stripe-shaped shielding portions of the same figure aligned in parallel at regular intervals, crossing with the first shielding portions at right angles, and the second measuring portion includes second-stripe shaped shielding portions identical to the first shielding portions of the first measuring portion and fourth stripe-shaped shielding portions identical to the third shielding portions, crossing with the second shielding portions at right angles in a central portion. In the resist length measuring process, the presence of the flare is checked by measuring the length of the resist pattern corresponding to the respective shielding portions in the longitudinal direction.

REFERENCES:
patent: 6233056 (2001-05-01), Naulleau et al.
patent: 6835507 (2004-12-01), Ki et al.
patent: 2003/0068565 (2003-04-01), Ki et al.
patent: 2004/0021854 (2004-02-01), Hikima
patent: 2001-222097 (2001-08-01), None
patent: 2001-296646 (2001-10-01), None
patent: 2003-100624 (2003-04-01), None

Affiliated with

Also associated with

Rating

Flare measuring mask and flare measuring method of... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Flare measuring mask and flare measuring method of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Flare measuring mask and flare measuring method of... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3754692