Valves and valve actuation – Electrically actuated valve
Reexamination Certificate
2000-12-28
2004-01-13
Thibodeau, Paul (Department: 1773)
Valves and valve actuation
Electrically actuated valve
C428S458000, C251S129020, C216S002000
Reexamination Certificate
active
06676106
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to thin laminate film structures for electrostatic or magnetic applications and methods for making such thin laminate film structures.
2. Description of the Related Art
One type of electrostatically actuated device with which the thin laminate film structures of this invention may be used is a flexible film, such as a flap or a diaphragm, of a fluid valve. For example, fluid valves having cantilevered blocking films are disclosed in U.S. Pat. No. 6,032,923 to Biegelsen et al., which is incorporated herein by reference in its entirety.
As shown in
FIG. 1
, a valve
90
has a valve housing
92
that defines an inlet port
94
and an outlet aperture
96
. The valve housing
92
is formed by an aperture plate
98
and an opposing port plate
100
positioned in a spaced apart relationship to the aperture plate
98
. The aperture plate
98
and the port plate
100
may be separately formed as distinct layers and bonded together with an adhesive layer
99
. The port plate
100
may have a curved surface
101
as shown, or may be flat. The aperture
96
is laterally offset from a flap comprising a flexible film
102
.
The flexible film
102
is sandwiched between the aperture plate
98
and the port plate
100
. The flexible film
102
may have a fixed end
103
held in position between the plates
98
and
100
, and an unfixed end
104
that is free to move between the plates
98
and
100
. The flexible film
102
is at least in part conductive so that a voltage can be applied to reliably switch the flexible film
102
between an aperture blocking position in which the inlet port
94
is blocked and an aperture open position in which the inlet port
94
is unblocked.
An electrode
106
connected to an electrode voltage source
107
is disposed in the port plate
100
. A dielectric layer
97
may be formed on the port plate
100
, as shown, or may be incorporated as part of the flexible film
102
. When the valve
90
is part of an addressable array, a film voltage source
105
is connected to the fixed end
103
of the flexible film
102
. Application of a voltage between the electrode
106
and the flexible film
102
generates an attractive electrostatic force between the electrode
106
and the flexible film
102
to cause the flexible film
102
to move into the aperture blocking position in which the inlet port
94
is blocked.
Other examples provide fluid valves having a diaphragm or membrane as a blocking film, such as the electromagnetic valves disclosed in U.S. Pat. No. 6,123,316 to Biegelsen et al., which is incorporated herein by reference in its entirety.
As shown in
FIG. 2
, an electromagnetic valve
200
is formed by laminates
202
that define a chamber
203
with an inlet conduit
225
and an outlet conduit
226
. A compressively stressed diaphragm
210
made of substantially uniform permalloy or other magnetically susceptible material is positioned in the chamber
203
. The diaphragm
210
is stressed to normally close the valve
200
by blocking the outlet conduit
226
.
An electrical lead such as a copper planar coil
216
is formed on a dielectric layer
218
of a permalloy layer
214
. A certain voltage applied to the coil
216
generates a current which generates a magnetic field providing a sufficiently attractive electromagnetic force between the coil
216
and the diaphragm
210
to pull diaphragm
210
into a non-blocking position
220
to open the valve
200
. Reducing or removing the applied voltage allows the diaphragm
210
to spring back into its normal position due to its mechanical bias, and close the valve
200
by blocking the outlet conduit
226
.
SUMMARY OF THE INVENTION
This invention provides a thin laminate film structure that allows separate determination and/or optimization of mechanical and electrical or magnetic properties.
This invention separately provides a thin laminate film structure that allows efficient actuation of electrostatically and/or magnetically driven devices.
This invention separately provides a thin laminate film structure that allows a lower voltage to be applied to generate an electrostatic or magnetic force that is sufficient to move the film structure.
This invention separately provides a thin laminate film structure that has stiffness optimized for a given electrostatic or magnetic application.
This invention separately provides a thin laminate film structure that has a desired strength for a given electrostatic or magnetic application.
This invention separately provides a thin laminate film structure for an electrostatically or magnetically actuated valve device.
This invention separately provides a thin laminate film structure that allows dual-direction actuation of electrostatically and/or magnetically driven devices.
This invention separately provides methods for making a thin laminate film structure.
In various exemplary embodiments of the thin laminate film structure and methods according to this invention, a metallic lamina is formed on a surface of a dielectric lamina and a third lamina is formed on a surface of the metallic lamina opposite the dielectric lamina. In various exemplary embodiments, the third lamina is attached to the metallic lamina by a thin film adhesive. In other various exemplary embodiments, the third lamina is attached to the metallic lamina by a thermal compression bond.
In various exemplary embodiments of the thin laminate film structure and methods according to this invention, the metallic lamina comprises a first metallic lamina. A second metallic lamina is formed on a surface of the third lamina opposite the first metallic lamina. A second dielectric lamina is formed on a surface of the second metallic lamina opposite the third lamina.
These and other features and advantages of this invention are described in, or are apparent from, the following detailed description of various exemplary embodiments of the systems and methods according to this invention.
REFERENCES:
patent: 3118785 (1964-01-01), Anderson et al.
patent: 3170833 (1965-02-01), Noyes
patent: 3308004 (1967-03-01), Rouault
patent: 4543295 (1985-09-01), St. Clair et al.
patent: 4934401 (1990-06-01), Ikehata et al.
patent: 5082242 (1992-01-01), Bonne et al.
patent: 5441597 (1995-08-01), Bonne et al.
patent: 6032923 (2000-03-01), Biegelsen et al.
patent: 6120002 (2000-09-01), Biegelsen et al.
patent: 6123316 (2000-09-01), Biegelsen et al.
Biegelsen, et al., AirJet paper mover: An example of meso-scale MEMS.
D. Biegelsen, et al., “High performance electrostatic air valves formed by thin-film lamination,” Proceedings of the Symposium on Micro-Mechanical Systems, ASME International Mechanical Engineering Congress and Exhibition, Nashville, TN, published 1999.
Biegelsen David K.
Swartz Lars E.
Krver Kevin
Thibodeau Paul
Xerox Corporation
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