Flap resonator, method of manufacturing a flap resonator,...

Details Flap resonator, method of manufacturing a flap resonator,... Flap resonator, method of manufacturing a flap resonator,...

2006-10-17

2009-10-06

Lee, Benny (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C257S415000

Reexamination Certificate

active

07598825

ABSTRACT:
Flap resonator, comprising a first electrode and a second electrode, the second electrode comprising a support part separated from an adjacent end of the first electrode by a dielectric part, and a beam part extending from said support part and over at least a part of a surface of the first electrode. The support part has an effective width that is smaller than the width of the beam part.

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patent: 1 585 219 (2004-04-01), None
J. Yang, et al., Mechanical Behavior of Ultrathin Microcantilever, Oct. 7, 1999, p. 102-107.
K. Yasumura, et al., Quality Factors in Micro-and Submicron-Thick Cantilevers, Mar. 2000, p. 117-125.
S. Pourkamali, et al., High-Q Single Crystal Silicon HARPSS Capacitive Beam Resonators With Self-Aligned Sub-100-nm Transduction Gaps, Aug. 2003, p. 487-496.
Communication from European Patent Office regarding counterpart application, Apr. 24, 2006.

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