Fizeau interference measuring method and apparatus therefor

Details Fizeau interference measuring method and apparatus therefor Fizeau interference measuring method and apparatus therefor

1990-09-27

1991-07-23

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356360, G01B 902

Patent

active

050338552

ABSTRACT:
A measuring method and apparatus for measuring the shape of an optical surface using Fizeau interference is disclosed. The states of three surfaces are determined by measuring Fizeau fringes between all possible pairs of said surfaces. In at least one of these measurements means for reversing the coordinate axis in the beam is provided.

REFERENCES:
patent: 3998553 (1976-12-01), Hunter et al.
Moore et al., "Direct Measurement of Phase in a Spherical-Wave Fizeau Interferometer", Applied Optics, vol. 19, No. 13, pp. 2196-2200, Jul. 1980.

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