Fixture for testing semiconductor devices

Details Fixture for testing semiconductor devices Fixture for testing semiconductor devices

1981-11-16

1984-07-17

Levy, Stewart J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, 324158P, 339108TP, G01R 106

Patent

active

044608683

ABSTRACT:
The preferred embodiment of the invention disclosed herein relates to an apparatus for testing semiconductor devices on a wafer containing a plurality of such devices. The apparatus includes a base having a support surface on which the semiconductor wafers can be located. The base further includes heater means for heating the surface and, thus, any wafers located thereon. Support stand means is associated with the base and extends above the support surface and a test probe unit connected in an electric test circuit is adjustably mounted on the support plate so that the probe unit is normal to and movable relative to the surface. Preferably, the test probe includes a tip that engages the wafer and this tip does not rotate when the position of the probe unit is adjusted.

REFERENCES:
patent: 3458687 (1969-07-01), Cranch
patent: 3710251 (1973-01-01), Hagge et al.
patent: 3759082 (1973-09-01), Provenzano et al.
patent: 3939414 (1976-02-01), Roch
patent: 3949295 (1976-04-01), Moorshead
patent: 3996517 (1976-12-01), Fergason et al.
patent: 4023102 (1977-05-01), Barrow et al.
patent: 4047780 (1977-09-01), Cedrone
patent: 4115736 (1978-09-01), Tracy
"Self-Shorting Voltage Probe", IBM Tech. Disc., vol. 22, No. 1, Jun. 1979, by K. J. Deskur et al., pp. 77-78.

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