Fixture for mechanical grinding and inspection of failed or defe

Details Fixture for mechanical grinding and inspection of failed or defe Fixture for mechanical grinding and inspection of failed or defe

1997-05-16

1999-10-19

Eley, Timothy V.

Abrading

Work holder

Clamp

451387, 451391, 29557, B24B 4106

Patent

active

059678895

ABSTRACT:
A fixture for holding a semiconductor chip during a polishing process can be made to also hold the chip while the chip is inspected by a scanning electron microscope. In this manner, the polishing of the chip may be inspected and monitored without removing the chip from the polishing fixture. This allows polishing to be resumed, if necessary, with more precision. This results because the position of the chip with respect to the polishing fixture has not been altered by removing and then resecuring the chip as would be otherwise necessary for microscopic inspection of the chip.

REFERENCES:
patent: 2484574 (1949-10-01), Leiman
patent: 2654979 (1953-10-01), Grodzinski et al.
patent: 4850157 (1989-07-01), Holmstrand
patent: 4876826 (1989-10-01), Denboer
patent: 5272844 (1993-12-01), Burgess et al.

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