Fixture for backside wafer etching

Details Fixture for backside wafer etching Fixture for backside wafer etching

1992-09-30

1994-01-25

Watson, Robert C.

Work holders

Holder encloses work

269903, B25B 120

Patent

active

052808947

ABSTRACT:
A fixture which includes a lower base for supporting and protecting the front surface of a semiconductor wafer and a clamp. The lower base has an upper end having a central surface portion recessed from a peripheral surface portion for supporting by means of an O ring the peripheral portion of the front surface of the wafer. The clamp rests on a peripheral portion of the back surface of the wafer with the remaining back surface exposed to the backside etching process. A pin and hole arrangement help align the clamp to the base. Holes in the base equalize pressure on both sides of the wafer.

REFERENCES:
patent: 4165573 (1979-08-01), Richards
patent: 4327830 (1982-05-01), Patel et al.
patent: 4605469 (1986-08-01), Shih et al.
patent: 4830182 (1989-05-01), Nakazato et al.
patent: 4886162 (1989-12-01), Ambrogio
patent: 5180150 (1993-01-01), Prusak et al.

Affiliated with

Also associated with

Rating

Fixture for backside wafer etching does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fixture for backside wafer etching, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fixture for backside wafer etching will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-722539