Fixture for alignment of vacuum nozzles on semiconductor manufac

Details Fixture for alignment of vacuum nozzles on semiconductor manufac Fixture for alignment of vacuum nozzles on semiconductor manufac

1993-09-24

1995-07-18

Wirthlin, Alvin

Geometrical instruments

Gauge

Straightness, flatness, or alignment

33550, 33555, 72 34, G01B 5252, B21C 5100

Patent

active

054330130

ABSTRACT:
An apparatus for measuring and correcting the straightness of a hollow vacuum nozzle for semiconductor assembly equipment comprises a collet which can rotate over 360.degree. and holds the nozzle. An indicator, such as a dial indicator, has a tip which conformally and continuously engages the nozzle so that as the collet and nozzle are rotated the indicator tip rides on the nozzle. Any horizontal movement of a bent nozzle is shown on the indicator. The bend in the nozzle can then be repaired and rechecked while the nozzle is installed in the collet.

REFERENCES:
patent: 1783088 (1930-11-01), Hill
patent: 1836041 (1931-12-01), Ricketts
patent: 1840237 (1932-01-01), Leighton
patent: 2371532 (1945-03-01), McDougal
patent: 4251922 (1981-02-01), Perlotto
patent: 4623410 (1986-11-01), Hillesheim et al.
patent: 4679330 (1987-07-01), Williams
patent: 5253499 (1993-10-01), Knipp et al.
patent: 5301436 (1994-04-01), Johnston
Woodworth Catalog Z-54, Zero Spindle Inspection Fixtures, 1956.

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