Fixture and system for handling plate like objects

Details Fixture and system for handling plate like objects Fixture and system for handling plate like objects

1974-10-02

1977-03-01

Werner, Frank E.

Handling: hand and hoist-line implements

Article carrier gripped and carried by hand

Convertible to, or useable as, different device or different...

294 64B, 302 2R, B65G 5350

Patent

active

040097854

ABSTRACT:
A system for handling plate like objects (e.g., semiconductor wafers) includes a gas actuated fixture having a surface for releasably picking up the plate like objects (e.g., by Bernoulli effect). Means is provided for moving the pickup fixture in a plane of motion from a first to second position. Means forming a part of the pickup fixture (e.g., a selectively pressured bellows) moves the pickup surface orthogonally to the plane of motion. An air track or other conveyer for the plate like objects includes means for restraining the objects beneath the first position. Means for positioning successive locations of a carrier for the plate like objects positions the successive locations beneath the second position. In operation, the system picks up the plate like objects from the conveyer, loads them onto the carrier, then unloads them from the carrier and returns them to the conveyer, all without subjecting the objects to human contamination.

REFERENCES:
patent: 3039623 (1962-06-01), Sehn et al.
patent: 3318468 (1967-05-01), Olson
patent: 3425736 (1969-02-01), Benjamin
patent: 3438668 (1969-04-01), Olsson
patent: 3645581 (1972-02-01), Lasch, Jr. et al.
patent: 3857496 (1974-12-01), Gonzales

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