Fixed-slit type photoelectric microscope

Details Fixed-slit type photoelectric microscope Fixed-slit type photoelectric microscope

1983-07-13

1985-12-24

Willis, Davis L.

Optics: measuring and testing

By polarized light examination

356400, G01B 1100

Patent

active

045602786

ABSTRACT:
A fixed-slit type photoelectric microscope comprises an irradiation system for irradiating a linear pattern with light beam, an objective for forming an image of the linear pattern, a single slit disposed at a point conjugate to the linear pattern with respect to the objective, a photoelectric conversion element for converting the light beam from the slit into an electrical signal, a rectifying circuit for rectifying an electrical signal from the photoelectric conversion element, and an indicator for visualizing the rectified signal. The irradiation system generates a pair of polarized light beams with planes of polarization orthogonal to each other and alternately illuminates the linear pattern with the pair of polarized light beams at fixed periods. For deflecting the pair of polarized light beams from the linear pattern in different directions, an optical deflecting element is provided between the linear pattern and the slit. Different portions of the slit are illuminated by the pair of polarized light beams deflected by the optical deflecting elements.

REFERENCES:
patent: 3502415 (1970-03-01), Hock
patent: 3943359 (1976-03-01), Matsumoto et al.
patent: 3990798 (1976-11-01), White
Proc. of International Conf. on Microlithography, Microcircuit Engineering '80 (1980), p. 181.

Affiliated with

Also associated with

Rating

Fixed-slit type photoelectric microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fixed-slit type photoelectric microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fixed-slit type photoelectric microscope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1476660