Fixed-point detector and displacement-measuring apparatus

Details Fixed-point detector and displacement-measuring apparatus Fixed-point detector and displacement-measuring apparatus

2008-06-24

2010-10-05

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07808649

ABSTRACT:
A fixed-point detector is provided. The fixed-point detector includes a plurality of fixed-point detecting patterns, a fixed-point detecting light source, and a plurality of photoelectric conversion elements. The plurality of fixed-point detecting patterns each have a pair of diffraction gratings for diffracting incident light in different directions. The fixed-point detecting light source irradiates the pair of diffraction gratings with light while moving in the measurement-axis direction with respect to the plurality of fixed-point detecting patterns. The plurality of photoelectric conversion elements move together with the fixed-point detecting light source, while receiving light beams diffracted by the respective diffraction gratings of the plurality of fixed-point detecting patterns and converting the diffracted light beams into electric signals.

REFERENCES:
patent: 6429940 (2002-08-01), Willhelm
patent: 2001/0017696 (2001-08-01), Narita et al.
patent: 2002/0021450 (2002-02-01), Aoki
patent: 2002/0080365 (2002-06-01), Monshouwer et al.
patent: 2006/0145066 (2006-07-01), Tamiya
patent: 04-324316 (1992-11-01), None

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