Fixed parallel plate MEMS capacitor microsensor array

Details Fixed parallel plate MEMS capacitor microsensor array Fixed parallel plate MEMS capacitor microsensor array

2006-10-02

2009-02-10

Nguyen, Cuong Q (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

Reexamination Certificate

active

07489017

ABSTRACT:
A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

REFERENCES:
patent: 6724612 (2004-04-01), Davis et al.
patent: 6812821 (2004-11-01), Fujita et al.
patent: 7271050 (2007-09-01), Hill
patent: 2002/0105080 (2002-08-01), Speakman et al.

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