Finely adjustable table assembly

Details Finely adjustable table assembly Finely adjustable table assembly

1974-08-26

1976-01-27

Duggan, Donovan F.

Electrical generator or motor structure

Dynamoelectric

Linear

335268, 318 38, 318115, H02K 4102

Patent

active

039354865

ABSTRACT:
A finely adjustable table assembly is particularly useful, for example, as a light-exposing device for printing IC (integrated-circuits) patterns and comprises a base plate, a movable table, a plurality of curved plate springs for connecting the movable plate to the base plate, and a non-contact means for driving the movable table. The curved plate springs are arranged perpendicularly to their widths between the movable table and the base plate and, as a sesult, the mass of the movable table is supported by the curved plate springs. As the table driving means, use is made of a non-contact type drive such as an electromagnetic device. The table is capable of being displaced in any direction in a horizontal plane. This displacement can be effected in a highly precise manner because of the absence of mechanical sliding members.

REFERENCES:
patent: 2925503 (1960-02-01), Efromson
patent: 3075100 (1963-01-01), Efromson
patent: 3163786 (1964-12-01), Dickinson
patent: 3286109 (1966-11-01), Madsen
patent: 3357511 (1967-12-01), Mackie
patent: 3656014 (1972-04-01), Rich
patent: 3744902 (1973-07-01), Heuker
patent: 3789285 (1974-01-01), Nishizawa

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