Fine positioning device and displacement controller therefor

Geometrical instruments – Gauge – Work support adjustment

Patent

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Details

33573, G01B 700, G05B 1101

Patent

active

049206605

ABSTRACT:
A fine positioning device is formed of a central rigid portion, a first set of outwardly-extending portions extending symmetrically along a first axis from the central rigid portion, a second set of outwardly-extending portions extending symmetrically from the central rigid portion along a second axis which is perpendicular to the first axis, a first set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the first set of outwardly-extending portions respectively to produce translational displacements along the second axis, and a second set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the second set of outwardly-extending portions respectively to produce translational displacements along the first axis. A displacement controller for the fine positioning device is also disclosed.

REFERENCES:
patent: 4686440 (1987-08-01), Hatamura
patent: 4688908 (1987-08-01), Moore

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