Fine positioning device and displacement controller therefor

Details Fine positioning device and displacement controller therefor Fine positioning device and displacement controller therefor

1988-09-14

1991-02-12

Will, Thomas B.

Geometrical instruments

Gauge

Work support adjustment

33573, 33 1M, 318646, B23Q 1600, G01B 500

Patent

active

049913093

ABSTRACT:
A fine positioning device is formed of a rigid support member; a first set of radial flexible-beam displacement mechanisms provided symmetrically to each other on the support member to produce angular displacements about a first axis; a second set of radial flexible-beam displacement mechanisms provided symmetrically to each other on the support member to produce angular displacements about a second axis which is perpendicular to the first axis; a third set of radial flexible-beam displacement mechanisms connected to either one of the sets of radial flexible-beam displacement mechanisms to produce angular diaplacements about a third axis which is perpendicular to both the first and second axes; and a fine motion table fixed on the radial flexible-beam displacement mechanisms which are other than those connected to the radial flexible-beam displacement mechanisms for producing angular displacements about the third axis.

REFERENCES:
patent: 4559717 (1985-12-01), Scire et al.
patent: 4667415 (1987-05-01), Barsky
patent: 4686440 (1987-08-01), Hatamura et al.

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