Fine positioning device

Geometrical instruments – Gauge – Work support

Patent

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Details

33 1M, 318646, G01B 500

Patent

active

048888788

ABSTRACT:
A fine positioning device is formed of a central rigid portion, a first set of outwardly-extending portions extending symmetrically along a first axis from the central rigid portion, a second set of outwardly-extending portions extending symmetrically from the central rigid portion along a second axis which is perpendicular to the first axis, a first set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the first set of outwardly-extending portions respectively to produce translational displacements along the second axis, and a second set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the second set of outwardly-extending portions respectively to produce translational displacements along the first axis. Three set of radial flexible-beam displacement mechanisms are provided to produce angular displacements about three axes.

REFERENCES:
patent: 4559717 (1985-12-01), Scire et al.
patent: 4667415 (1987-05-01), Barsky
patent: 4686440 (1987-08-01), Hatamura et al.

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