Fine particulate polishing agent, method for producing the same

Details Fine particulate polishing agent, method for producing the same Fine particulate polishing agent, method for producing the same

1998-02-26

1999-09-14

Koslow, Melissa

Abrasive tool making process, material, or composition

With inorganic material

Metal or metal oxide

51307, 51308, 438693, C09G 102, C09K 314, C01R 1700, H01L 21309

Patent

active

059517247

ABSTRACT:
A fine particulate polishing agent comprises fine particles of a solid solution composed of single-crystal ceric oxide and silicon dioxide and fine particles of silicon dioxide. A slurry polishing agent comprising the fine particulate polishing agent can be prepared by a method which comprises the steps of mixing, with stirring, single-crystal ceric oxide fine particles, silica sol and a liquid; drying the mixture; subjecting the dried particulate material to a thermal treatment at a high temperature and then cooling the solid solution powder formed by the thermal treatment and composed of single crystal ceric oxide and silicon dioxide; again mixing the powder with silica sol and a liquid; and then subjecting the mixture to deagglomeration using a wet pulverizing mill to give a slurry.

REFERENCES:
patent: 5543126 (1996-08-01), Ota et al.
patent: 5766279 (1998-06-01), Ueda et al.

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