Fine line scribing of conductive material

Details Fine line scribing of conductive material Fine line scribing of conductive material

1990-12-14

1992-09-22

Valentine, Donald R.

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

2041293, 156643, C25F 312, C25F 314, B44C 122

Patent

active

051494043

ABSTRACT:
Fine lines (approximately 3 microns or less) are patternable on conductive materials by electromachining techniques. These micro-techniques differ from conventional electromachining in that the linewidth is primarily determined by the characteristics of the electric field rather than the electrode geometry.

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A. L. Livshits, Electro-Erosion Machining of Metals, p. 1, Butterworths, London (1960).

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