Fine force control of actuators for chemical mechanical...

Details Fine force control of actuators for chemical mechanical... Fine force control of actuators for chemical mechanical...

2005-02-15

2005-02-15

Nguyen, Dung Van (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

Computer controlled

C451S011000, C451S288000

Reexamination Certificate

active

06855032

ABSTRACT:
An actuator assembly (432) for positioning a pad (48) includes a first actuator assembly (440), a second actuator subassembly (442) and a control system (524). In one embodiment, the first actuator subassembly (440) includes a first core (502), and a conductor (504) secured to the first core (502), and the second actuator subassembly (442) includes a second core (506) spaced apart a component gap (444) from the first core (502). Further, the control system (524) directs current to the conductor (504) to attract the second core (506) to the first core (502). In one embodiment, the amount of current directed to the conductor (504) is calculated without measuring the component gap (444).

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patent: 6213855 (2001-04-01), Natalicio
patent: 20020033230 (2002-03-01), Hayashi et al.

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