Fine clearance measuring apparatus

Details Fine clearance measuring apparatus Fine clearance measuring apparatus

1984-07-23

1986-12-23

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, G01B 902

Patent

active

046309268

ABSTRACT:
One of two articles arranged to form a fine clearance therebetween is made of a transparent material through which a light flux is impinged to the other article to form a reflection light which includes an interference fringe pattern information representing the fine clearance between the two articles. The reflection light is focused on a photo-electric conversion plane and converted to an electrical signal. The photo-electrically converted interference fringe pattern information is then converted to digital information, which is stored in a frame memory. A computer reads out the digital information from the frame memory and determines peak positions of light and/or dark areas of the interference fringe to measure the fine clearance between the two articles.

REFERENCES:
patent: 4159522 (1979-06-01), Zanoni
Bowen, "Interferometer Alignment Tool", IBM Tech. Diclos. Bulletin, vol. 15, No. 12, pp. 3691-3692, 5/73.
Lin et al., "An Application of White Light Interferometry in Thin Film Measurements", IBM Journal of Research and Development, vol. 16, No. 3, pp. 269-276.

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