Fin device with capacitor integrated under gate electrode

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Charge transfer device

Reexamination Certificate

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Details

C257S270000, C257S328000, C257S331000, C257S365000, C257SE21442, C257SE29275

Reexamination Certificate

active

10904357

ABSTRACT:
A fin-type field effect transistor (FinFET) has a fin having a center channel portion, end portions comprising source and drain regions, and channel extensions extending from sidewalls of the channel portion of the fin. The structure also includes a gate insulator covering the channel portion and the channel extensions, and a gate conductor on the gate insulator. The channel extensions increase capacitance of the channel portion of the fin.

REFERENCES:
patent: 5391506 (1995-02-01), Tada et al.
patent: 6720619 (2004-04-01), Chen et al.
patent: 2003/0042531 (2003-03-01), Lee et al.
patent: 2003/0151077 (2003-08-01), Mathew et al.
patent: 2004/0197975 (2004-10-01), Krivokapic et al.

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