Fin capacitor

Details Fin capacitor Fin capacitor

2005-09-20

2005-09-20

Thomas, Eric W. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S311000, C029S025420, C257S301000, C438S286000

Reexamination Certificate

active

06947275

ABSTRACT:
Disclosed is a capacitor structure and method for forming the same. This structure has a conductive substrate, conductive fins extending above the substrate, and trenches extending into the substrate. These trenches are positioned between locations where the fins extend above the substrate. The invention includes an insulator in the trenches and covering the fins. This insulator separates the substrate and fins from a conductive top plate that covers the fins and fills the trenches. A bottom plate contact electrically connects the fins and the substrate such that the fins and the substrate comprise a bottom plate of the capacitor structure.

REFERENCES:
patent: 5796573 (1998-08-01), Kotecki et al.
patent: 6002575 (1999-12-01), Kotecki et al.
patent: 6642090 (2003-11-01), Fried et al.
patent: 6664582 (2003-12-01), Fried et al.
patent: 2002/0020866 (2002-02-01), Lee et al.
patent: 2002/0163026 (2002-11-01), Park
patent: 2003/0102497 (2003-06-01), Fried, et al
patent: 2003/0178670 (2003-09-01), Fried, et al
patent: 2003/0193058 (2003-10-01), Fried, et al
patent: 2003/0197194 (2003-10-01), Fried, et al
patent: 2004/0175492 (2004-09-01), Won et al.

Affiliated with

Also associated with

Rating

Fin capacitor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fin capacitor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fin capacitor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3442771