Filters employing porous strongly acidic polymers

Details Filters employing porous strongly acidic polymers Filters employing porous strongly acidic polymers

2006-04-04

2006-04-04

Lawrence, Frank M. (Department: 1724)

Gas separation: processes

Filtering

Coated or chemically treated filter

C055S524000, C055SDIG007, C427S180000, C427S372200, C427S244000

Reexamination Certificate

active

07022164

ABSTRACT:
A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.

REFERENCES:
patent: 3019127 (1962-01-01), Czerwonka et al.
patent: 3409691 (1968-11-01), Small
patent: 3607706 (1971-09-01), Eisenmann et al.
patent: 3998988 (1976-12-01), Shimomai et al.
patent: RE29410 (1977-09-01), Yoshino
patent: 4072793 (1978-02-01), Watanabe et al.
patent: 4204011 (1980-05-01), Tanabe et al.
patent: 4224415 (1980-09-01), Meitzner et al.
patent: 4313832 (1982-02-01), Shimizu et al.
patent: 4322230 (1982-03-01), Schoen et al.
patent: 4629479 (1986-12-01), Cantoni
patent: 4852133 (1989-07-01), Ikeda et al.
patent: 4904343 (1990-02-01), Giglia et al.
patent: 4981501 (1991-01-01), Von Blucher et al.
patent: 5039321 (1991-08-01), Satoh et al.
patent: 5133864 (1992-07-01), Vaughn et al.
patent: 5166530 (1992-11-01), McCleary
patent: 5204055 (1993-04-01), Sachs et al.
patent: 5290345 (1994-03-01), Osendorf et al.
patent: 5300604 (1994-04-01), Nasman et al.
patent: 5306321 (1994-04-01), Osendorf
patent: 5328758 (1994-07-01), Markell et al.
patent: 5340656 (1994-08-01), Sachs et al.
patent: 5387380 (1995-02-01), Cima et al.
patent: 5399377 (1995-03-01), Economy et al.
patent: 5430303 (1995-07-01), Matsumoto et al.
patent: 5462485 (1995-10-01), Kinkead
patent: 5486410 (1996-01-01), Groeger et al.
patent: 5582865 (1996-12-01), Rezuke et al.
patent: 5605746 (1997-02-01), Groeger et al.
patent: 5607647 (1997-03-01), Kinkead
patent: 5616169 (1997-04-01), De Ruiter et al.
patent: 5626820 (1997-05-01), Kinkead et al.
patent: 5647356 (1997-07-01), Osendorf et al.
patent: 5685895 (1997-11-01), Hagiwara et al.
patent: 5743927 (1998-04-01), Osendorf
patent: 5753345 (1998-05-01), Kuma et al.
patent: 5772884 (1998-06-01), Tanaka et al.
patent: 5783608 (1998-07-01), Sugo et al.
patent: 5807424 (1998-09-01), De Ruiter et al.
patent: 5833726 (1998-11-01), Kinkead et al.
patent: 5834114 (1998-11-01), Economy et al.
patent: 5856198 (1999-01-01), Joffe et al.
patent: 5890367 (1999-04-01), You et al.
patent: 5906429 (1999-05-01), Mori et al.
patent: 5944878 (1999-08-01), Lindhe
patent: 6056805 (2000-05-01), Litwin et al.
patent: 6227383 (2001-05-01), De Ruiter et al.
patent: 6352579 (2002-03-01), Hirata et al.
patent: 6447584 (2002-09-01), Kishkovich et al.
patent: 6610128 (2003-08-01), Kishkovich et al.
patent: 2002/0078828 (2002-06-01), Kishkovich et al.
patent: 19859788 (2000-03-01), None
patent: 0335034 (1989-10-01), None
patent: 0398847 (1990-11-01), None
patent: 0584030 (1994-02-01), None
patent: WO 00/07696 (2000-02-01), None
patent: WO 00/25896 (2000-05-01), None
Kishkovich, O., et al., “An Accelerated Testing Technique for Evaluating Performmance of Chemical Air Filters for DUV Photolithographic Equipment,” SPIE vol. 3677, pp. 857-865 (Part of the SPIE Conference on Metrology, Inspection and Process Control for Microlithography XIII, Santa Clara, CA) (Mar. 1999).

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