Gas separation: apparatus – With sampling means
Reexamination Certificate
2006-03-21
2006-03-21
Hopkins, Robert A. (Department: 1724)
Gas separation: apparatus
With sampling means
C096S417000, C055S385200, C055S482000, C055S484000, C055S486000, C055S522000
Reexamination Certificate
active
07014693
ABSTRACT:
A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.
REFERENCES:
patent: 4135896 (1979-01-01), Parish et al.
patent: 4760423 (1988-07-01), Holtje et al.
patent: 4946480 (1990-08-01), Hauville
patent: 5023654 (1991-06-01), Matsumoto et al.
patent: 5130743 (1992-07-01), Katoh et al.
patent: 5143552 (1992-09-01), Moriyama
patent: 5181819 (1993-01-01), Sakata et al.
patent: 5219464 (1993-06-01), Yamaga et al.
patent: 5434644 (1995-07-01), Kitano et al.
patent: 5459943 (1995-10-01), Tanahashi
patent: 5514196 (1996-05-01), Tanahashi et al.
patent: 5833726 (1998-11-01), Kinkead et al.
patent: 5964927 (1999-10-01), Graham et al.
Donaldson LithGuard Molecular Filtration Systems, Hotolithography Brochure, pp. 4.
Goodwin William M.
Grayfer Anatoly
Kinkead Devon
Kishkovich Oleg P.
Ruede David
Hopkins Robert A.
Mykrolis Corporation
Weingarten Schurgin, Gagnebin & Lebovici LLP
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