Filtering photoresist-containing liquid

Details Filtering photoresist-containing liquid Filtering photoresist-containing liquid

1997-08-12

2000-08-22

Fortuna, Ana

Liquid purification or separation

Processes

Liquid/liquid solvent or colloidal extraction or diffusing...

210652, 210660, 210670, 210681, 210767, 2101952, B01D 6100

Patent

active

061067229

ABSTRACT:
A method of filtering feed liquid including a photoresist substance comprises removing cations from the feed liquid using an ion exchange material. A fine particle filter filters the feed liquid and, in particular, removes dissolved solids from the feed liquid. The material is regenerated with a solution, e.g., a brine solution, which has a pH effective to avoid fouling of at least one of the filter and the ion exchange material. Another embodiment concerns a filtration apparatus including an ion exchange device containing the ion exchange material. A fine particle filtration device removes dissolved solids from the liquid. A device for regenerating the material includes a supply of the regenerating solution.

REFERENCES:
patent: 3891552 (1975-06-01), Prior et al.
patent: 4337153 (1982-06-01), Prior
patent: 4427549 (1984-01-01), Brown et al.
patent: 4764280 (1988-08-01), Brown et al.
patent: 4786417 (1988-11-01), Miki et al.
patent: 4863612 (1989-09-01), Kirman et al.
patent: 4889623 (1989-12-01), Prior et al.
patent: 4917123 (1990-04-01), McConnel et al.
patent: 5112491 (1992-05-01), Strantz, Jr.
patent: 5310488 (1994-05-01), Hansen et al.
patent: 5348588 (1994-09-01), Winston
patent: 5415765 (1995-05-01), Banham et al.
patent: 5543263 (1996-08-01), Rahman et al.
patent: 5925255 (1999-07-01), Mukhopadhyay
PEM Permased Engineering Manual Du Pont Company/Polymer Products Dep, Dec. 1, 1982 Bulletin 203.

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