Filtering apparatus with stirrer in a CMP apparatus

Details Filtering apparatus with stirrer in a CMP apparatus Filtering apparatus with stirrer in a CMP apparatus

1998-07-07

2000-08-22

Walker, W. L.

Liquid purification or separation

Casing divided by membrane into sections having inlet

Rotating mechanical agitator adjacent membrane

451446, 451 60, 210415, 366274, B01D 3500

Patent

active

061067148

ABSTRACT:
A chemical-mechanical polishing (CMP) apparatus includes a filtering apparatus for filtering slurry. The filtering apparatus includes an input aperture located at the top of the filter housing and connected to a slurry supplying machine. An output aperture located at the side of the filter housing is connected to a polishing pad. The filtering apparatus also includes a filter attached to the top of the filter housing and a stirring objected located below the filter. A stirrer is located below the filter housing for driving the stirring object without a mechanical contact. The stirring object is preferably bar-shaped and enclosed with PTFE.

REFERENCES:
patent: 4145293 (1979-03-01), Cook
patent: 4328096 (1982-05-01), Chupka et al.
patent: 4368112 (1983-01-01), Thompson et al.
patent: 4547289 (1985-10-01), Okano et al.
patent: 4689152 (1987-08-01), Liang
patent: 4849263 (1989-07-01), Pepe et al.
patent: 5044314 (1991-09-01), McNeilly
patent: 5047126 (1991-09-01), Greenberg
patent: 5296139 (1994-03-01), Hanson et al.
patent: 5755614 (1998-05-01), Adams et al.
patent: 5791970 (1998-08-01), Yueh
patent: 5799643 (1998-09-01), Miyata et al.
patent: 5855792 (1999-01-01), Adams et al.
patent: 5895315 (1999-04-01), Pinder, Jr.
patent: 6015499 (2000-01-01), Hayden

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