Filtered cathodic arc deposition apparatus and method

Details Filtered cathodic arc deposition apparatus and method Filtered cathodic arc deposition apparatus and method

1997-03-27

1999-05-11

Nguyen, Nam

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

20429841, 427580, C23C14/24

Patent

active

059024623

ABSTRACT:
A filtered cathodic arc deposition method and apparatus for the production of highly dense, wear resistant coatings which are free from macro particles. The filtered cathodic arc deposition apparatus includes a cross shaped vacuum chamber which houses a cathode target having an evaporable surface comprised of the coating material, means for generating a stream of plasma, means for generating a transverse magnetic field, and a macro particle deflector. The transverse magnetic field bends the generated stream of plasma in the direction of a substrate. Macro particles are effectively filtered from the stream of plasma by traveling, unaffected by the transverse magnetic field, along the initial path of the plasma stream to a macro particle deflector. The macro particle deflector has a preformed surface which deflects macro particles away from the substrate.

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