Organic compounds -- part of the class 532-570 series – Organic compounds – Carboxylic acids and salts thereof
Reexamination Certificate
2007-07-10
2007-07-10
Norton, Nadine (Department: 1765)
Organic compounds -- part of the class 532-570 series
Organic compounds
Carboxylic acids and salts thereof
C252S079200, C252S079300, C252S079400, C252S079500, C438S292000, C134S003000
Reexamination Certificate
active
11420742
ABSTRACT:
An improved aqueous soluble surfactant which has particular utility for incorporating in etchants for semiconductor devices is provided. The surfactant comprises a combination of a linear perfluorocarboxylic acid, a cyclic amine and an aliphatic alcohol.
REFERENCES:
patent: 4517106 (1985-05-01), Hopkins
patent: 4761245 (1988-08-01), Scardera
patent: 4795582 (1989-01-01), Ohmi
patent: 5496485 (1996-03-01), Maternaghan
Craig James
Hong Brian
Mori Erik J.
General Chemical Performance Products LLC
George Patricia A
Norton Nadine
Plantamura Arthur J.
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