Filter sheet for purifying photoresist composition

Details Filter sheet for purifying photoresist composition Filter sheet for purifying photoresist composition

1997-07-30

2000-08-15

Cintins, Ivars

Liquid purification or separation

Filter

Material

1621642, 1621811, 1621816, 1621818, 210504, 210505, 210508, B01D 3918

Patent

active

061031224

ABSTRACT:
A filter sheet is provided which comprises a self-supporting fibrous matrix having immobilized therein particulate filter aid and particulate ion exchange resin, wherein said particulate filter aid and particulate ion exchange resin are distributed substantially uniformly throughout a cross-section of said matrix. A process for removing ionic impurities from a photoresist solution is also provided which comprises passing the photoresist solution through said filter sheet to remove ionic impurities therefrom.

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