Filter pump head assembly improvements

Details Filter pump head assembly improvements Filter pump head assembly improvements

1988-12-19

1990-04-10

Smith, Leonard E.

Pumps

Combined

417435, 417479, 2104161, F04B 4302

Patent

active

049155970

ABSTRACT:
Valve and channeling improvements in a filter pump head assembly used for dispensing photoresist in a semiconductor manufacturing facility. The improvements comprise sturdier construction, so that a supporting sheath is not necessary; single-tool assembly and disassembly; a conically tapered filter cavity, tapered bubble ring, and inlet orifice and vent orifice arrangement to maximize the assembly's venting ability; a modified filter cavity to accommodate a pleated membrane type higher throughput filter; a depression surrounding the outlet orifice to better ease fluid out of the filter chamber; placement of the bottom pneumatic control port at the side of the assembly rather than at the bottom, said bottom being shaped so that the assembly can stand upright unaided during operation; oval-shaped pneumatic valves to improve dispensing accuracy; visually marked fluid ports to avoid cross plumbing; a shutoff screw integrated into a vent valve, to reduce part count and for a cleaner design; an outlet valve fluid relief channel to encourage cleaner shutoff; and fittings to achieve fluid connection strain relief and threadless sealing.

REFERENCES:
patent: 2818029 (1957-12-01), Petzold
patent: 4276004 (1981-06-01), Hahn
patent: 4690621 (1987-09-01), Swain

Affiliated with

Also associated with

Rating

Filter pump head assembly improvements does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Filter pump head assembly improvements, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Filter pump head assembly improvements will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2296660