Filter pump head assembly

Details Filter pump head assembly Filter pump head assembly

1986-04-15

1987-09-01

Smith, Leonard E.

Pumps

Combined

417394, 417395, 2104161, F04B 4302

Patent

active

046906215

ABSTRACT:
A filter pump head assembly (10) is adapted for use with pneumatic pumping control systems. The assembly includes a rigid case subassembly (12) enclosing a chemically inert liner subassembly (14) which encloses a filter subassembly (16). The liner subassembly (14) includes a pneumatically deformable pumping membrane (72), the deformation of which varies the volume surrounding a filter cartridge (112). Various valves (33, 34 and 35) and ports are operated by selective pneumatic pressure on a top membrane (68). The control block (80) includes a bubble capture channel (94) which allows the bleeding of undesirable gas bubbles during use. The invention pump of the various disclosed embodiments is particularly adapted to pump and filter ultrapure, reactive fluids varying viscosities at a low pumping pressure. The primary current commercial usage of the invention is in the semiconductor manufacturing industry.

REFERENCES:
patent: 2529204 (1950-11-01), Van Ranst et al.
patent: 2540134 (1951-02-01), Nelson
patent: 3741687 (1973-06-01), Nystroem
patent: 4146485 (1979-03-01), Broad

Affiliated with

Also associated with

Rating

Filter pump head assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Filter pump head assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Filter pump head assembly will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1262821