Filter medium for air filter and process for producing the same

Details Filter medium for air filter and process for producing the same Filter medium for air filter and process for producing the same

2005-08-16

2005-08-16

Hopkins, Robert A. (Department: 1724)

Gas separation

Combined or convertible

In environmental air enclosure

C055S524000, C055SDIG005

Reexamination Certificate

active

06929672

ABSTRACT:
The present invention has as its object to provide an air filter not only for trapping suspended particulate substances but also for not generating hazardous contaminates in the air, which cause trouble in the manufacture of semiconductor devices. As a binder to bind fibers of the air filter together, a polymer dispersion is used in which a copolymer of a hydrophilic monomer and a hydrophobic monomer is dispersed in water. As an initiator for polymerization of the copolymer, an organic peroxide is used. When an air filter (8) is installed downstream of a chemical filter (7), the space (4) placed downstream of the air filter (8) is made substantially free of organic substances and/or inorganic substances that cause trouble in the manufacture of semiconductor devices.

REFERENCES:
patent: 3944690 (1976-03-01), Distler et al.
patent: 4291087 (1981-09-01), Warburton, Jr.
patent: 4859527 (1989-08-01), DiStefano
patent: 5514196 (1996-05-01), Tanahashi et al.
patent: 06142439 (1994-05-01), None
patent: A-9-29020 (1997-02-01), None
patent: A97/187612 (1997-07-01), None
patent: WO97/04851 (1997-02-01), None

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